����(gu��)ENTEGRIS��(y��ng)�ظ���WG3NS8RR2�F(xi��n)؛��Wafergard? III NF Micro XL �ھ����w�^(gu��)�V��
?
?�鳬�����wϵ�y(t��ng)�^(gu��)�V�ṩԽ�����^(gu��)�V���Ǹߜغ̈́�(d��ng)�B(t��i)������(y��ng)�õ������x��
�����M(j��n)���⚤�M��ͨ�^(gu��)��С�����Ӆ^(q��)���(l��i)��������
ȫ���ٽY(ji��)��(g��u)�Ǹߜغ̈́�(d��ng)�B(t��i)������(y��ng)�õ������x��
�o���ijߴ���`�������x���ṩ����ߵ��O(sh��)Ӌ(j��)Ч�ʲ�����ȵؽ����˹��̳ɱ�
��(y��ng)��
Wafergard
?III?NF?Micro?XL?�ھ����w�^(gu��)�V����(y��ng)��
�������w�ܾ�
�ߜؑ�(y��ng)��
�¹��S���O(sh��)
��(d��ng)����(y��ng)��
���Ժͻ��Ԛ��w
�a(ch��n)ƷҎ(gu��)��
���� �Vо ���Y(ji��)�Ĥ�^(gu��)�V��
? ס�� 늒���?VAR316L?���P��⚤
�����坍�� ���� <0.03?�w��/����<1?�w��/ft?3��?>0.01?��m
? �]�l(f��)�� Volatile?outgassing?of?H2O,?O2,?and?THC?is?below?detectable?limits?(by?RGA?and?FID?at?room?temperature)
Removal?rating ��0.0015?��m
Surface?finsh?interior ��5?��in?Ra
Helium?leak?rating Qualified 2?��?10-10?atm-cc
c.
? Tested 1?��?10-9?atm-cc
c.
Maximum?operating?conditions: Maximum?inlet?pressure 20?MPa?(200?bar,?2900?psid)?at?20��C?(68oF)
? Design?pressure 20?MPa?(200?bar,?2900?psid)?at?20��C?(68oF)
? Maximum?forward/reverse?differential?pressure 1?MPa?(10?bar,?150?psid)
? Maximum?operating?temperature Inert?gases 400��C?(725��F)?@?35?bar?(500?psi)
? ? Corrosive?and?reactive?gases 50��C?(122��F)?@?70?bar?(1000?psi)
Warranty 5?year
Particle?retention Greater?than?99.9999999%?(9?LRV)?removal?of?all?particles?at?15?slpm
Flow?rating Refer?to?performance?data
?���̖(h��o)
Wafergard
?III?NF?Micro?XL?�ھ����w�^(gu��)�V������̖(h��o)
���̖(h��o) ���^�ߴ����� �L(zh��ng)��
WG3NS8RR2 1/4"?�|Ȧ�ܷ�����c?VCR?���^���ݣ����ݼy���/���� 84.1?���ף�3.31"��
WG3NS8RR2P 1/4"?�|Ȧ�ܷ⣨�c?VCR?���^���ݣ����ݼy���/���������^�������w��������w���o(h��) 84.1?���ף�3.31"��
WG3NS8SL2 1/4"?�ܷ�|Ȧ���c?VCR?���^���ݣ����ݼy���/���ڣ����� 50.8?���ף�2.00"��?
����(gu��)EntegrisӢ�ظ�,�^(gu��)�V���Vо��WGPMOGGT4��MRO�̳ǬF(xi��n)؛
����(gu��)EntegrisӢ�ظ�,�^(gu��)�V���Vо��WGPMOGGT4��MRO�̳ǬF(xi��n)؛
����(gu��)EntegrisӢ�ظ�,�^(gu��)�V���Vо��WGPMOGGT4��MRO�̳ǬF(xi��n)؛
?
?
Gasketgard? �ھ��|Ƭ�^(gu��)�V����WGPM0GGT4��WGPMOGGT4�F(xi��n)؛�r(ji��)
?
?Gasketgard
?�ھ��|Ƭ�^(gu��)�V����һ�N�o����ȫ�����^(gu��)�V�����������(bi��o)��(zh��n)��?1/4"��3/8"?��?1/2"?VCR
?�|Ƭ��
���������ڌ�(du��)�R
�����p�ɲ����(bi��o)��(zh��n)���w�ܾ����O(sh��)Ӌ(j��)
�߉��ߜؑ�(y��ng)�õ������x��
���o(h��)�P(gu��n)�I���������w���p��
������һ����?ISO?�J(r��n)�C�O(sh��)ʩ������
��(y��ng)��
Gasketgard
?�ھ��|Ƭ�^(gu��)�V����(y��ng)��
�m���ڸ��_(d��)?400��C?(752��F)?�đ�(y��ng)��
���ڱ��o(h��)���К��w�ɷ�
�m���ڸ߉��ߜؑ�(y��ng)��?
�a(ch��n)ƷҎ(gu��)��
���ϣ� ���ӵ�?316L?���P䓉|Ƭ�ϵğ��Y(ji��)?316L?���P��^(gu��)�V���|(zh��) ?
? ������?316?���P� ?
�w�������� ����?0.3?��m?ֱ���������w��ȥ���ʳ��^(gu��)?95% ?
�\(y��n)�Зl���� ��� 1?4��?P1��5.1?MPa��51?bar��740?psid��
1?4��?P2��10.4?MPa��104?bar��1508?psid��
1?2��?P1��1.7?MPa��17?bar��247?psid��
1?2��?P2?��2.9?������29?����421?��/ƽ��Ӣ�磩
? ��߹����ض� 400��C?(752��F)?[���Ԛ��w]
���̖(h��o)
Gasketgard
?�ھ��|Ƭ�^(gu��)�V������̖(h��o)
���̖(h��o) ���^�ߴ����� �L(zh��ng)��
WGPM0GGG2 1/4"?�� 25.00?���ף�0.98"��
WGPM0GGT2 1/4"?�͎��̶��� 25.25?���ף�0.99"��
WGPM0GGT4 1/2"?(3/8")?�͎��̶��� 29.50?���ף�1.16"��
??
ENTEGRIS WGPMOGGT2
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGPM0GGG2 �^(gu��)�V��
ENTEGRIS WG3NS1RR2 �^(gu��)�V��
Entegris WG2FT1SS2 �^(gu��)�V��
Entegris WG2FT1SS2 �^(gu��)�V��
ENTEGRIS WGMXMSRR4 �^(gu��)�V��
ENTEGRIS WGMXMSRR2
Entegris WG2FT1RR2 �^(gu��)�V��
Entegris WG2FT1RR2 �^(gu��)�V��
Entegris WG2FT1RR2 �^(gu��)�V��
Entegris WG2FT1RR2 �^(gu��)�V��
ENTEGRIS WGMXMSRR2���o(w��)���b��
ENTEGRIS WG3NSMSL2 �^(gu��)�V��
ENTEGRIS WG3NSMSL2
ENTEGRIS WG3NSMSL2
ENTEGRIS CBUG0S0S1 �^(gu��)�V��
ENTEGRIS WG3NS8RR2 �^(gu��)�V��
ENTEGRIS WGMXMPRR4
ENTEGRIS WGMXMPSS3
ENTEGRIS WG2F02RR4
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGPMOGGT2
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGPM0GGT4 �^(gu��)�V��
ENTEGRIS WGPM0GGG2 �^(gu��)�V��
ENTEGRIS LGMXFPRR4
?
ENTEGRIS WGPMOGGT2
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGPM0GGG2 �^(gu��)�V��
ENTEGRIS WG3NS1RR2 �^(gu��)�V��
Entegris WG2FT1SS2 �^(gu��)�V��
Entegris WG2FT1SS2 �^(gu��)�V��
ENTEGRIS WGMXMSRR4 �^(gu��)�V��
ENTEGRIS WGMXMSRR2
Entegris WG2FT1RR2 �^(gu��)�V��
Entegris WG2FT1RR2 �^(gu��)�V��
Entegris WG2FT1RR2 �^(gu��)�V��
Entegris WG2FT1RR2 �^(gu��)�V��
ENTEGRIS WGMXMSRR2���o(w��)���b��
ENTEGRIS WG3NSMSL2 �^(gu��)�V��
ENTEGRIS WG3NSMSL2
ENTEGRIS WG3NSMSL2
ENTEGRIS CBUG0S0S1 �^(gu��)�V��
ENTEGRIS WG3NS8RR2 �^(gu��)�V��
ENTEGRIS WGMXMPRR4
ENTEGRIS WGMXMPSS3
ENTEGRIS WG2F02RR4
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGPMOGGT2
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGPM0GGT4 �^(gu��)�V��
ENTEGRIS WGPM0GGG2 �^(gu��)�V��
ENTEGRIS LGMXFPRR4
?
ENTEGRIS WGPMOGGT2
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGPM0GGG2 �^(gu��)�V��
ENTEGRIS WG3NS1RR2 �^(gu��)�V��
Entegris WG2FT1SS2 �^(gu��)�V��
Entegris WG2FT1SS2 �^(gu��)�V��
ENTEGRIS WGMXMSRR4 �^(gu��)�V��
ENTEGRIS WGMXMSRR2
Entegris WG2FT1RR2 �^(gu��)�V��
Entegris WG2FT1RR2 �^(gu��)�V��
Entegris WG2FT1RR2 �^(gu��)�V��
Entegris WG2FT1RR2 �^(gu��)�V��
ENTEGRIS WGMXMSRR2���o(w��)���b��
ENTEGRIS WG3NSMSL2 �^(gu��)�V��
ENTEGRIS WG3NSMSL2
ENTEGRIS WG3NSMSL2
ENTEGRIS CBUG0S0S1 �^(gu��)�V��
ENTEGRIS WG3NS8RR2 �^(gu��)�V��
ENTEGRIS WGMXMPRR4
ENTEGRIS WGMXMPSS3
ENTEGRIS WG2F02RR4
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGPMOGGT2
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGFGT1PR1 �^(gu��)�V��
ENTEGRIS WGPM0GGT4 �^(gu��)�V��
ENTEGRIS WGPM0GGG2 �^(gu��)�V��
ENTEGRIS LGMXFPRR4
?
?
?

?