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? ס�� 늒���?VAR316L?���P��⚤
�����坍�� ���� <0.03?�w��/����<1?�w��/ft?3��?>0.01?��m
? �]�l(f��)�� Volatile?outgassing?of?H2O,?O2,?and?THC?is?below?detectable?limits?(by?RGA?and?FID?at?room?temperature)
Removal?rating ��0.0015?��m
Surface?finsh?interior ��5?��in?Ra
Helium?leak?rating Qualified 2?��?10-10?atm-ccc.
? Tested 1?��?10-9?atm-ccc.
Maximum?operating?conditions: Maximum?inlet?pressure 20?MPa?(200?bar,?2900?psid)?at?20��C?(68oF)
? Design?pressure 20?MPa?(200?bar,?2900?psid)?at?20��C?(68oF)
? Maximum?forward/reverse?differential?pressure 1?MPa?(10?bar,?150?psid)
? Maximum?operating?temperature Inert?gases 400��C?(725��F)?@?35?bar?(500?psi)
? ? Corrosive?and?reactive?gases 50��C?(122��F)?@?70?bar?(1000?psi)
Warranty 5?year
Particle?retention Greater?than?99.9999999%?(9?LRV)?removal?of?all?particles?at?15?slpm
Flow?rating Refer?to?performance?data
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