�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ������F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ��飬�F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ������F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ������F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ��飬�F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ��飬�F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ��飬�F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ������F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ��飬�F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ��飬�F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ������F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ��飬�F(xi��n)؛

�����f��Honeywell ���w�ɜy��̽�^MIDAS-E-SHX���׹���/�ҹ������F(xi��n)؛

Detectable Gases

Gas Name Chemical Formula Range Sensor Part Number

Ammonia NH3 0 - 100ppm MIDAS-S-NH3

Arsine AsH3 0 - 0.2ppm MIDAS-S-ASH

Boron Trichloride BCl3 0 - 8.0ppm MIDAS-S-HCL

Boron Trifluoride BF3 0 - 8.0ppm MIDAS-S-HFX

Boron Trifluoride (Low Level) BF3 0 - 2.0ppm MIDAS-S-HFL

Bromine Br2 0 - 0.4ppm MIDAS-S-BR2

Carbon Dioxide CO2 0 - 2.0% vol MIDAS-S-CO2

Carbon Monoxide CO 0 - 100ppm MIDAS-S-COX

Chlorine Cl2 0 - 2.0ppm MIDAS-S-HAL

Chlorine Dioxide ClO2 0 - 0.4ppm MIDAS-S-BR2

Chlorine Trifluoride ClF3 0 - 0.4ppm MIDAS-S-SF4

Diborane B2H6 0 - 0.4ppm MIDAS-S-HYD

Dichlorosilane H2SiCl2 0 - 8.0ppm MIDAS-S-HCL

Difluoromethane CH2F2 0 - 120ppm MIDAS-S-CFX

Disilane Si2H6 0 - 20ppm MIDAS-S-SHX

Fluorine F2 0 - 4.0ppm MIDAS-S-HAL

Germane GeH4 0 - 0.8ppm MIDAS-S-HYD

Hexafluorobutadiene C4F6 0 - 40ppm MIDAS-S-CFX

Hydrogen (% LEL)* H2 0 - 100% LEL MIDAS-S-LEL

Hydrogen (ppm) H2 0 - 1000ppm MIDAS-S-H2X

Hydrogen Bromide HBr 0 - 8.0ppm MIDAS-S-HCL

Hydrogen Chloride HCl 0 - 8.0ppm MIDAS-S-HCL

Hydrogen Cyanide HCN 0 - 20ppm MIDAS-S-HCN

Hydrogen Fluoride HF 0 - 12ppm MIDAS-S-HFX

Hydrogen Fluoride (Low Level) HF 0 - 2.0ppm MIDAS-S-HFL

Hydrogen Sulphide H2S 0 - 40ppm MIDAS-S-H2S

Hydrogen Sulphide (High Level) H2S 0 - 100ppm MIDAS-S-HSH

Methane (% LEL)* CH4 0 - 100% LEL MIDAS-S-LEL

Methyl Fluoride CH3F 0 - 60ppm MIDAS-S-CFX

Nitrogen Dioxide NO2 0 -12ppm MIDAS-S-NO2

Nitrogen Oxide NO 0 - 100ppm MIDAS-S-NOX

Nitrogen Trifluoride NF3 0 - 40ppm MIDAS-S-HFX

Octofluorocyclopentene C5F8 0 - 40ppm MIDAS-S-CFX

Oxygen Proficiency & Deficiency O2 0 - 25% vol MIDAS-S-O2X

Ozone O3 0 - 0.4ppm MIDAS-S-O3X

Phosphine PH3 0 - 1.2ppm MIDAS-S-PH3

Phosphorous Oxychloride POCl3 0 - 0.4ppm MIDAS-S-POC

Silane SiH4 0 - 20ppm MIDAS-S-SHX

Silane (low level) SiH4 0 - 2.0ppm MIDAS-S-SHL

Sulphur Dioxide SO2 0 - 8.0ppm MIDAS-S-SO2

Sulphur Hexafluoride SF6 0 - 8000ppm MIDAS-S-CFX

Sulphur Tetrafluoride SF4 0 - 0.4ppm MIDAS-S-SF4

Tetra Ethyl Ortho Silicate TEOS 0 - 40ppm MIDAS-S-TEO

Tungsten Hexafluoride WF6 0 - 12ppm MIDAS-S-HFX

Tungsten Hexafluoride (Low Level) WF6 0 - 2.0ppm MIDAS-S-HFL

?

�� NH3 0-100 ppm MIDAS-S-NH3 �� ��

�黯���� AsH3 0-0.2 ppm MI DAS-S-ASH �黯���� �׻���

���Ȼ��� BCl3 0-8.0 ppm MIDAS-S-HCL �Ȼ��� ��

�������� BF3 0-8.0 ppm MIDAS-S-HFX ������ ��

�� Br2 0-0.4 ppm MIDAS-S-BR2 �� ��

������̼ CO2 0-2.0% vol MIDAS-S-CO2 ������̼ ������̼

һ����̼ CO 0-100 ppm MIDAS-S-COX һ����̼ һ����̼

�� Cl2 0-2.0 ppm MI DAS-S-HAL �� ��

�������� ClO2 0-0.4 ppm MIDAS-S-BR2 �� ��

�������� ClF3 0-0.8 ppm MIDAS-S-SF4 ������ ��

������ B2 0-0.4 ppm MIDAS-S-HYD ������ �׻���

���ȼ׹��� H2SiCl2 0-8.0 ppm MIDAS-S-HCL �Ȼ��� ��

�ҹ��� Si2H6 0-20 ppm MIDAS-S-SHX ���� �򻯚�

�� F2 0-4.0 ppm MI DAS-S-HAL �� ��

�N�� GeH4 0-0.8 ppm MIDAS-S-HYD Diborane Phosphine

�� (% LEL) H2 0-100% LEL1 MIDAS-S-LEL �� ��

��(ppm) H2 0-1000 ppm MIDAS-S-H2X �� ��

�廯�� HBr 0-8.0 ppm MIDAS-S-HCL �Ȼ��� ��

�Ȼ��� HCl 0-8.0 ppm MIDAS-S-HCL �Ȼ��� ��

�軯�� HCN 0-20 ppm MIDAS-S-HCN �軯�� һ����̼

������ HF 0-12 ppm MIDAS-S-HFX ������ ��

������ H2Se 0-0.4 ppm MIDAS-S-HSE ���� �򻯚�

�򻯚� H2S 0-40 ppm MIDAS-S-H2S �򻯚� �򻯚�

����(% LEL) CH4 0-100% LEL1 MIDAS-S-LEL �� ��

�������� NO2 0-12 ppm MIDAS-S-NO2 �������� ��������

һ������ NO 0-100 ppm MIDAS-S-NOX һ������ һ������

�������� NF3 0-40 ppm MIDAS-S-HFX ������ ��

�����ؽM&���� O2 0-25% vol MIDAS-S-O2X ���� �՚�

���� O3 0-0.4 ppm MIDAS-S-O3X ���� �Ț�

�׻��� PH3 0-1.2 ppm MIDAS-S-PH3 �׻��� �׻���

�������� POCl3 0-0.8 ppm MIDAS-S-POC �Ȼ��� ��

���� SiH4 0-20 ppm MIDAS-S-SHX ���� �򻯚�

����(�ͼ��e) SiH4 0-2.0 ppm MIDAS-S-SHL ���� �򻯚�

�������� SO2 0-8.0 ppm MIDAS-S-SO2 �������� ��������

�ķ����� SF4 0-0.8 ppm MIDAS-S-SF4 ������ ��

���������� TEOS 0-40 ppm MIDAS-S-TEO TEOS һ����̼

�������u WF6 0-12 ppm MIDAS-S-HFX ������ ��

?

?

?