Gas Measured Nitrogen Trifluoride (NF3)
Cartridge Part Number MIDAS-S-XHF 1 year standard warranty
MIDAS-E-XHF 2 year extended warranty
Sensor Technology 3 electrode electrochemical cell
Measuring Range (ppm) NF3 0 - 40 ppm
Minimum Alarm 1 Set Point 4.0ppm
Repeatability < �� 10% of measured value
Linearity < �� 20% of measured value
Response Time t 62.5 < 110 seconds
Sensor Cartridge Life Expectancy �� 24 months under typical application conditions
Operating Temperature 0��C to +40��C (32��F to 104��F)
Effect of Temperature < �� 0.002ppm / ��C (at 0��C to 20��C)
Zero < �� 0.008ppm / ��C (at 20��C to 40��C)
Sensitivity < �� 0.4% of measured value / ��C
Operating Humidity (continuous) 20 �C 75% rH 1
Effect of Humidity
Zero < �� 0.003ppm / % rH
Sensitivity < �� 1% of measured value / % rH
Operating Pressure 90 - 110kPa
Effect of Position No effect in typical application
Long Term Drift
Zero No drift
Sensitivity < 15% of measured value / year
Calibration Gas Hydrogen Fluroide (HF)
Challenge Gas (Bump Test) Chlorine (Cl2 )
Warm Up Time < 20 minutes
Storage Temperature +5��C to +25��C (+41��F to +77��F)
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