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Ammonia NH3 0 - 100 ppm MIDAS-E-NH3
Arsine AsH3 0 - 0.2 ppm MIDAS-E-ASH
Boron Trichloride BCl3 0 - 8.0 ppm MIDAS-E-HCL
Boron Trifluoride BF3 0 - 8.0 ppm MIDAS-E-HFX
Boron Trifluoride (Low Level) BF3 0 - 0.2 ppm MIDAS-E-HFL
Bromine Br2 0 - 0.4 ppm MIDAS-E-BR2
Carbon Dioxide CO2 0 - 2.0 % vol MIDAS-E-CO2
Carbon Monoxide CO 0 - 100 ppm MIDAS-E-COX
Chlorine Cl2 0 - 2.0 ppm MIDAS-E-HAL
Chlorine Dioxide ClO2 0 - 0.4 ppm MIDAS-E-BR2
Chlorine Trifluoride ClF3 0 - 0.4 ppm MIDAS-E-SF4
Diborane B2H6 0 - 0.4 ppm MIDAS-E-HYD
Dichlorosilane H2SiCl2 0 - 8.0 ppm MIDAS-E-HCL
Difluoromethane CH2F2 0 - 120 ppm MIDAS-E-CFX
Disilane Si2H6 0 - 20 ppm MIDAS-E-SHX
Fluorine F2 0 - 4.0 ppm MIDAS-E-HAL
Germane GeH4 0 - 0.8 ppm MIDAS-E-HYD
Hexafluorobutadiene C4F6 0 - 40 ppm MIDAS-E-CFX
Hydrogen (% LEL)* H2 0 - 100% LEL MIDAS-E-LEL
Hydrogen (ppm) H2 0 - 1000 ppm MIDAS-E-H2X
Hydrogen Bromide HBr 0 - 8.0 ppm MIDAS-E-HCL
Hydrogen Chloride HCl 0 - 8.0 ppm MIDAS-E-HCL
Hydrogen Cyanide HCN 0 - 20 ppm MIDAS-E-HCN
Hydrogen Fluoride HF 0 - 12 ppm MIDAS-E-HFX
Hydrogen Fluoride (Low Level) HF 0 - 2.0 ppm MIDAS-E-HFL
Hydrogen Selenide H2Se 0 - 0.4 ppm MIDAS-E-HSE
Hydrogen Sulfide H2S 0 - 40 ppm MIDAS-E-H2S
Hydrogen Sulfide (High Level) H2S 0 - 100ppm MIDAS-E-HSH
Methane (% LEL)* CH4 0 - 100% LEL MIDAS-E-LEL
Methyl Fluoride CH3F 0 - 60 ppm MIDAS-E-CFX
Nitrogen Dioxide NO2 0 -12 ppm MIDAS-E-NO2
Nitrogen Oxide NO 0 - 100 ppm MIDAS-E-NOX
Nitrogen Trifluoride NF3 0 - 40 ppm MIDAS-E-HFX
Octofluorocyclopentene C5F8 0 - 40 ppm MIDAS-E-CFX
Oxygen Proficiency & Deficiency O2 0 - 25% vol MIDAS-E-O2X
Ozone O3 0 - 0.4 ppm MIDAS-E-O3X
Phosphine PH3 0 - 1.2 ppm MIDAS-E-PH3
Phosphorous Oxychloride POCl3 0 - 0.4 ppm MIDAS-E-POC
Silane SiH4 0 - 20 ppm MIDAS-E-SHX
Silane (low level) SiH4 0 - 2.0 ppm MIDAS-E-SHL
Sulfur Dioxide SO2 0 - 8.0 ppm MIDAS-E-SO2
Sulfur Hexafluoride SF6 0 - 8000 ppm MIDAS-E-CFX
Sulfur Tetrafluoride SF4 0 - 0.4 ppm MIDAS-E-SF4
Tetra Ethyl Ortho Silicate TEOS 0 - 40 ppm MIDAS-E-TEO
Tungsten Hexafluoride WF6 0 - 12 ppm MIDAS-E-HFX
Tungsten Hexafluoride (Low Level) WF6 0 - 2.0 ppm MIDAS-E-HFL
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MIDAS-S-ASH? ? - Arsine (AsH3), Germane (GeH4)
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MIDAS-S-B2H? ? - Diborane (B2H6)
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MIDAS-S-BR2? ? ?- Bromine (Br2), Chlorine Dioxide (ClO2)
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MIDAS-S-CO2? ? - Carbon Dioxide (CO2)
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MIDAS-S-COX? ? - Carbon Monoxide (CO)
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MIDAS-S-H2S? ? ?- Hydrogen Sulfide (H2S)
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MIDAS-S-H2X? ? - Hydrogen (H2)
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MIDAS-S-HAL? ? - Chlorine (Cl2), Fluorine (F2)
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MIDAS-S-HCL? ? ?- Boron Trichloride (BCl3), Dichlorosilane (H2Cl2Si), Hydrogen Bromide (HBr), Hydrogen Chloride (HCl)
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MIDAS-S-HCN? ? - Hydrogen Cyanide (HCN)
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MIDAS-S-HFL? ? ?- Boron Trfluoride (BF3), Hydrogen Fluoride HF (low level), Tungsten Hexafluoride (WF6) (Low)
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MIDAS-S-HFX? ? - Boron Trifluoride (BF3), Hydrogen Fluoride (HF), Nitrogen Trifluoride (NF3) Tungsten Hexafluoride (WF6)
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MIDAS-S-LEL? ? ? - Hydrogen (H2), Methane (CH4)
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MIDAS-S-NH3? ? - Ammonia (NH3)
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MIDAS-S-NO2? ? - Nitrogen Dioxide (NO2)
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MIDAS-S-NOX? ?- Nitric Oxide (NO)
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MIDAS-S-O2X? ? - Oxygen (O2)
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MIDAS-S-O3X? ? - Ozone (O3)
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MIDAS-S-PH3? ? - Phosphine (PH3)
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MIDAS-S-SHL? ? ?- Silane (SiH4) (Low Level)
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MIDAS-S-SHX? ? - Silane (SiH4), Disilane (Si2H6)
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MIDAS-S-SO2? ? - Sulfur Dioxide (SO2)
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MIDAS-S-TEO? ? - TEOS
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MIDAS-S-XCF? ? ?- Difluoromethane (CH2F2), Hexafluorobutadiene (C4F6), Octofluorocyclopentene (C5F8),
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MIDAS-S-XHF? ? - Nitrogen Trifluoride (NF3), Methyl Fluoride (CH3F),
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MIDAS-S/E-NH3
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MIDAS-S/E-ASH
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MIDAS-S/E-HCL
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MIDAS-S/E-HFX
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MIDAS-S/E-HFU
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MIDAS-S/E-HFL
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MIDAS-S/E-BR2
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MIDAS-S/E-CO2
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MIDAS-S/E-CO2
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MIDAS-S/E-COX
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MIDAS-S/E-HAL
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MIDAS-S/E-BR2
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MIDAS-S/E-B2H
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MIDAS-S/E-HCL
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MIDAS-S/E-HCH
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MIDAS-S/E-XCF
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MIDAS-S/E-SHX
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MIDAS-S/E-LEL
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MIDAS-S/E-HAL
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MIDAS-S/E-XCF
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MIDAS-S/E-CFH
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MIDAS-S/E-LEL
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MIDAS-S/E-H2X
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MIDAS-S/E-HCL
