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vol.
HMDS Hexamethyldisilazane 9602-6714 0 ... 500 ppm
N2
H4 Hydrazine 9602-7600 0 ... 1.00 ppm
NH3 Ammonia 100ppm 9602-6704 0 ... 100 ppm
Standard
NH3 Ammonia 1000ppm 9602-6705 0 ... 1000 ppm
Standard, for higher range
NO Nitric Oxide 9602-7200 0 ... 250 ppm
NO2 Nitrogen Dioxide 9602-7300 0 ... 25.0 ppm
O2 Oxygen 9602-5500 0 ... 25.0 % vol.
O3 Ozone 9602-7100 0 ... 1.00 ppm
O3 Ozone 9602-7101 0 ... 1.00 ppm Exhaust
monitoring
PH3 Phosphine (2 El.) 9602-6100 0 ... 1.00 ppm
special application
PH3 Phosphine (3 El.) 9602-6101 0 ... 1.00 ppm
SiH4 Silane 9602-6300 0 ... 50.0 ppm
SO2 Sulphur Dioxide 9602-5900 0 ... 25.0 ppm
TEOS Tetraethyl Silicate 9602-7500 0 ... 100 ppm
TMB Trimethyl Borate 9602-7510 0 ... 200 ppm
TMP Trimethyl Phosphite 9602-7800 0 ... 30.0 ppm
CH4 Methane 9602-9900 0 ... 100 LEL for Satellite C
only /Standard
CH4 Methane 9602-9901 0 ... 100 LEL for Satellite C
only

vol.
HMDS Hexamethyldisilazane 9602-6714 0 ... 500 ppm
N2
H4 Hydrazine 9602-7600 0 ... 1.00 ppm
NH3 Ammonia 100ppm 9602-6704 0 ... 100 ppm
Standard
NH3 Ammonia 1000ppm 9602-6705 0 ... 1000 ppm
Standard, for higher range
NO Nitric Oxide 9602-7200 0 ... 250 ppm
NO2 Nitrogen Dioxide 9602-7300 0 ... 25.0 ppm
O2 Oxygen 9602-5500 0 ... 25.0 % vol.
O3 Ozone 9602-7100 0 ... 1.00 ppm
O3 Ozone 9602-7101 0 ... 1.00 ppm Exhaust
monitoring
PH3 Phosphine (2 El.) 9602-6100 0 ... 1.00 ppm
special application
PH3 Phosphine (3 El.) 9602-6101 0 ... 1.00 ppm
SiH4 Silane 9602-6300 0 ... 50.0 ppm
SO2 Sulphur Dioxide 9602-5900 0 ... 25.0 ppm
TEOS Tetraethyl Silicate 9602-7500 0 ... 100 ppm
TMB Trimethyl Borate 9602-7510 0 ... 200 ppm
TMP Trimethyl Phosphite 9602-7800 0 ... 30.0 ppm
CH4 Methane 9602-9900 0 ... 100 LEL for Satellite C
only /Standard
CH4 Methane 9602-9901 0 ... 100 LEL for Satellite C
only

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