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Midas? SENSOR CARTRIDGE SPECIFICATIONS MIDASSilane Group (SiH4 Si2H6) MIDAS-S-SHX, MIDAS-E-SHX
GAS?MEASURED?Silane?(SiH4) CARTRIDGE?PART?NUMBER SENSOR?TECHNOLOGY?3?electrode?electrochemical?cell MIDAS-S-SHX?1?year?standard?warranty MIDAS-E-SHX?2?year?extended?warranty MEASURING?RANGE?(PPM)?SiH4?0?�C?20?ppm MINIMUM?ALARM?1?SET?POINT?2.50?ppm REPEATABILITY??5%?of?measured?value RESPONSE?TIME?T62.5?3?seconds SENSOR?CARTRIDGE?LIFE?EXPECTANCY?��?24?months?under?typical?application conditions OPERATING?TEMPERATURE?EFFECT?OF TEMPERATURE ZERO SENSITIVITY 0o?to?+?40oC?(32o?to?104oF) ?0.01?ppm?/?oC?(0o?to?20oC) ?0.04?ppm?/?oC?(20o?to?40oC) ?0.8%?of?measured?value?/?oC OPERATING?PRESSURE?90?-?110kPa EFFECT?OF?POSITION?No?effect?in?typical?application LONG?TERM?DRIFT ZERO SENSITIVITY 2?ppm?/?year ?10%?of?measured?value?/?year CALIBRATION?GAS?Silane?(SiH4) CHALLENGE?GAS?(BUMP?TEST)?Hydrogen?Sulfide?(H2S) WARM?UP?TIME?20?minutes STORAGE?TEMPERATURE?+5��?to?+?25��C?(+41��?to?+77��F) The?sensor?data?listed?is?based?on?ideal?test?environment; observed?performance?may?vary?based?on?the?actual monitoring?system?and?the?sampling?conditions?employed Other?Detectable?Gases The?following?additional?gases?can?be?detected?with?this?sensor cartridge.?Sensor?performance?and?characteristics?will?be representative?of?the?data?as?tabulated?above.?Consult?the Technical?Manual?to?set?up?the?Midas?transmitter?with?the designated?identification?code?for?each?of?the?following?gas?types. DETECTABLE?GAS?CHEMICAL?FORMULA?MEASURING?RANGE Disilane?Si2H6?0?�C?2?ppm Cross?Sensitivities Each?Midas?sensor?is?potentially?cross?sensitive?to?other gases?and?this?may?cause?a?gas?reading?when?exposed?to other?gases?than?those?originally?designated.?The?table below?presents?typical?readings?that?will?be?observed?when?a new?sensor?cartridge?is?exposed?to?the?cross?sensitive?gas (or?a?mixture?of?gases?containing?the?cross?sensitive?species). GAS?/?VAPOR?CHEMICAL FORMULA CONCENTRATION APPLIED?(PPM) READING (PPM?HF) Ammonia?NH3?100?0 Arsine?AsH3?1?0.54 Carbon?Monoxide?CO?2000?0.56 -0.86 0.45 0 Chlorine?Cl2?5 Diborane?B2H6?1?0.75 Ethanol?C2H5OH?500?0 Hydrogen?H2?5000 Hydrogen?Chloride?HCl?12.5?2.1 Hydrogen?Fluoride?HF?10?0 Hydrogen?Sulfide?H2S?10?2.7 Iso?Propanol?C3H7OH?2000 Nitrogen?Dioxide?NO2?6?-0.89 Phosphine?PH3?1?1.13 Sulfur?Dioxide?SO2?50?3.5
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