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Midas?
SENSOR CARTRIDGE SPECIFICATIONS
MIDASSilane Group (SiH4 Si2H6)
MIDAS-S-SHX, MIDAS-E-SHX

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GAS?MEASURED?Silane?(SiH4)
CARTRIDGE?PART?NUMBER
SENSOR?TECHNOLOGY?3?electrode?electrochemical?cell
MIDAS-S-SHX?1?year?standard?warranty
MIDAS-E-SHX?2?year?extended?warranty
MEASURING?RANGE?(PPM)?SiH4?0?�C?20?ppm
MINIMUM?ALARM?1?SET?POINT?2.50?ppm
REPEATABILITY? RESPONSE?TIME?T62.5? SENSOR?CARTRIDGE?LIFE?EXPECTANCY?��?24?months?under?typical?application
conditions
OPERATING?TEMPERATURE?EFFECT?OF
TEMPERATURE
ZERO
SENSITIVITY
0o?to?+?40oC?(32o?to?104oF)
OPERATING?PRESSURE?90?-?110kPa
EFFECT?OF?POSITION?No?effect?in?typical?application
LONG?TERM?DRIFT
ZERO
SENSITIVITY
CALIBRATION?GAS?Silane?(SiH4)
CHALLENGE?GAS?(BUMP?TEST)?Hydrogen?Sulfide?(H2S)
WARM?UP?TIME? STORAGE?TEMPERATURE?+5��?to?+?25��C?(+41��?to?+77��F)
The?sensor?data?listed?is?based?on?ideal?test?environment;
observed?performance?may?vary?based?on?the?actual
monitoring?system?and?the?sampling?conditions?employed
Other?Detectable?Gases
The?following?additional?gases?can?be?detected?with?this?sensor
cartridge.?Sensor?performance?and?characteristics?will?be
representative?of?the?data?as?tabulated?above.?Consult?the
Technical?Manual?to?set?up?the?Midas?transmitter?with?the
designated?identification?code?for?each?of?the?following?gas?types.
DETECTABLE?GAS?CHEMICAL?FORMULA?MEASURING?RANGE
Disilane?Si2H6?0?�C?2?ppm
Cross?Sensitivities
Each?Midas?sensor?is?potentially?cross?sensitive?to?other
gases?and?this?may?cause?a?gas?reading?when?exposed?to
other?gases?than?those?originally?designated.?The?table
below?presents?typical?readings?that?will?be?observed?when?a
new?sensor?cartridge?is?exposed?to?the?cross?sensitive?gas
(or?a?mixture?of?gases?containing?the?cross?sensitive?species).
GAS?/?VAPOR?CHEMICAL
FORMULA
CONCENTRATION
APPLIED?(PPM)
READING
(PPM?HF)
Ammonia?NH3?100?0
Arsine?AsH3?1?0.54
Carbon?Monoxide?CO?2000?0.56
-0.86
0.45
0
Chlorine?Cl2?5
Diborane?B2H6?1?0.75
Ethanol?C2H5OH?500?0
Hydrogen?H2?5000
Hydrogen?Chloride?HCl?12.5?2.1
Hydrogen?Fluoride?HF?10?0
Hydrogen?Sulfide?H2S?10?2.7
Iso?Propanol?C3H7OH?2000
Nitrogen?Dioxide?NO2?6?-0.89
Phosphine?PH3?1?1.13
Sulfur?Dioxide?SO2?50?3.5

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