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Gas?Name?Chemical?Formula?Range?Sensor?Part?Number
Ammonia?NH3?0-100?ppm?MIDAS-E-NH3
Arsine?AsH3?0-200?ppb?MIDAS-E-ASH
Boron?Trichloride?BCl3?0-8?ppm?MIDAS-E-HCL
Boron?Trifluoride?BF3?0-8?ppm?MIDAS-E-HFX
Boron?Trifluoride?(Low?Level)?BF3?0-2?ppm?MIDAS-E-HFL
Bromine?Br2?0-0.4?ppm?MIDAS-E-BR2
Butane?n-C4H10?0~100?%LEL?MIDAS-E-LEB
Carbon?Dioxide?CO2?0-2.0%?MIDAS-E-CO2
Carbon?Monoxide?CO?0-100?ppm?MIDAS-E-COX
Carbon?Monoxide?(Low?H2?interference)?CO?0-100?ppm?MIDAS-E-COH
Chlorine?Cl2?0-2?ppm?MIDAS-E-HAL
Chlorine?Dioxide?ClO2?0-0.4?ppm?MIDAS-E-BR2
Diborane?B2H6?0-400?ppb?MIDAS-E-B2H
Dichlorosilane?H2Cl2Si?0-8?ppm?MIDAS-E-HCL
Difluoromethane**?CH2F2?0-240?ppm?MIDAS-E-XCF
Disilane?Si2H6?0-20?ppm?MIDAS-E-SHX
Ethylene?C2H4?0~100?%LEL?MIDAS-E-LEL
Fluorine?F2?0-4?ppm?MIDAS-E-HAL
Germane?GeH4?0-800?ppb?MIDAS-E-ASH
Hexafluorobutadiene**?C4F6?0-40?ppm?MIDAS-E-CFX
Hydrogen?(%LEL)?H2?0~100?%LEL?MIDAS-E-LEL*
Hydrogen?(ppm)?H2?0-1000?ppm?MIDAS-E-H2X
Hydrogen?Bromide?HBr?0-8?ppm?MIDAS-E-HCL
Hydrogen?Chloride?HCl?0-8?ppm?MIDAS-E-HCL
Hydrogen?Cyanide?HCN?0-20?ppm?MIDAS-E-HCN
Hydrogen?Fluoride?HF?0-12?ppm?MIDAS-E-HFX
Hydrogen?Fluoride?(Low?Level)?HFL?0-2?ppm?MIDAS-E-HFL
Hydrogen?Sulfide?H2S?0-40?ppm?MIDAS-E-H2S
Methane?(%LEL)?CH4?0~100?%LEL?MIDAS-E-LEL*
Methyl?Fluoride**?CH3F?0-120?ppm?MIDAS-E-XHF
Nitric?Oxide?NO?0-100?ppm?MIDAS-E-NOX
Nitrogen?Dioxide?NO2?0-12?ppm?MIDAS-E-NO2
Nitrogen?Trifluoride**?NF3?0-40?ppm?MIDAS-E-HFX?for?00P,?XHF?for?NP1
Octane?n-C8H18?0~100?%LEL?MIDAS-E-LEO
Octofluorocyclopentene**?C5F8?0-40?ppm?MIDAS-E-XCF
Oxygen?O2?0~25%?v??MIDAS-E-O2X
Ozone?O3?0-0.7?ppm?MIDAS-E-O3H
Ozone?(Low?Level)?O3?0-0.4?ppm?MIDAS-E-O3X
Phosphine?PH3?0-1200?ppb?MIDAS-E-PH3
Propane?C3H8?0~100?%LEL?MIDAS-E-LEX
Propylene?C3H6?0~100?%LEL?MIDAS-E-LEL
R134a?C2H2F4?0-1000?ppm?MIDAS-E-XCF
Silane?SiH4?0-20?ppm?MIDAS-E-SHX
Silane?(Low?Level)?SiH4?0-2?ppm?MIDAS-E-SHL
Sulfur?Dioxide?SO2?0-8?ppm?MIDAS-E-SO2
Tetra?Ethyl?Ortho?Silicate?TEOS?0-40?ppm?MIDAS-E-TEO

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