美國honeywellanalytics甲烷可燃?xì)怏w探頭，MIDAS-E-LEL，嚴(yán)選
美國honeywellanalytics甲烷可燃?xì)怏w探頭，MIDAS-E-LEL，嚴(yán)選
ygen Proficiency & Deficiency O2 0 - 25% vol MIDAS-E-O2X
Ozone O3 0 - 0.4 ppm MIDAS-E-O3X
Phosphine PH3 0 - 1.2 ppm MIDAS-E-PH3
Phosphorous Oxychloride POCl3 0 - 0.4 ppm MIDAS-E-POC
Silane SiH4 0 - 20 ppm MIDAS-E-SHX
Silane (low level) SiH4 0 - 2.0 ppm MIDAS-E-SHL
Sulfur Dioxide SO2 0 - 8.0 ppm MIDAS-E-SO2
Sulfur Hexafluoride SF6 0 - 8000 ppm MIDAS-E-CFX
Sulfur Tetrafluoride SF4 0 - 0.4 ppm MIDAS-E-SF4
Tetra Ethyl Ortho Silicate TEOS 0 - 40 ppm MIDAS-E-TEO
Tungsten Hexafluoride WF6 0 - 12 ppm MIDAS-E-HFX
Tungsten Hexafluoride (Low Level) WF6 0 - 2.0 ppm MIDAS-E-HFL
MIDAS-S-ASH - Arsine (AsH3), Germane (GeH4)
MIDAS-S-B2H - Diborane (B2H6)
MIDAS-S-BR2 - Bromine (Br2), Chlorine Dioxide (ClO2)
MIDAS-S-CO2 - Carbon Dioxide (CO2)
MIDAS-S-COX - Carbon Monoxide (CO)
MIDAS-S-H2S - Hydrogen Sulfide (H2S)
MIDAS-S-H2X - Hydrogen (H2)
MIDAS-S-HAL - Chlorine (Cl2), Fluorine (F2)
MIDAS-S-HCL - Boron Trichloride (BCl3), Dichlorosilane (H2Cl2Si), Hydrogen Bromide (HBr), Hydrogen Chloride (HCl)
MIDAS-S-HCN - Hydrogen Cyanide (HCN)
MIDAS-S-HFL - Boron Trfluoride (BF3), Hydrogen Fluoride HF (low level), Tungsten Hexafluoride (WF6) (Low)
MIDAS-S-HFX - Boron Trifluoride (BF3), Hydrogen Fluoride (HF), Nitrogen Trifluoride (NF3) Tungsten Hexafluoride (WF6)
MIDAS-S-LEL - Hydrogen (H2), Methane (CH4)
MIDAS-S-NH3 - Ammonia (NH3)
MIDAS-S-NO2 - Nitrogen Dioxide (NO2)
MIDAS-S-NOX - Nitric Oxide (NO)
MIDAS-S-O2X - Oxygen (O2)
MIDAS-S-O3X - Ozone (O3)
MIDAS-S-PH3 - Phosphine (PH3)
MIDAS-S-SHL - Silane (SiH4) (Low Level)
MIDAS-S-SHX - Silane (SiH4), Disilane (Si2H6)
MIDAS-S-SO2 - Sulfur Dioxide (SO2)
MIDAS-S-TEO - TEOS
MIDAS-S-XCF - Difluoromethane (CH2F2), Hexafluorobutadiene (C4F6), Octofluorocyclopentene (C5F8),
MIDAS-S-XHF - Nitrogen Trifluoride (NF3), Methyl Fluoride (CH3F),
MIDAS-S/E-NH3
MIDAS-S/E-ASH
MIDAS-S/E-HCL
MIDAS-S/E-HFX
MIDAS-S/E-HFU
MIDAS-S/E-HFL
MIDAS-S/E-BR2
MIDAS-S/E-CO2
MIDAS-S/E-CO2
MIDAS-S/E-COX
MIDAS-S/E-HAL
MIDAS-S/E-BR2
MIDAS-S/E-B2H
MIDAS-S/E-HCL
MIDAS-S/E-HCH
MIDAS-S/E-XCF
MIDAS-S/E-SHX
MIDAS-S/E-LEL
MIDAS-S/E-HAL
MIDAS-S/E-XCF
MIDAS-S/E-CFH
MIDAS-S/E-LEL
MIDAS-S/E-H2X
MIDAS-S/E-HCL
MIDAS-K-ASH 砷化氫 (AsH3)、鍺烷 (GeH4) 18-200 ppb 70-800 ppb
MIDAS-K-HCL 三氯化硼 (BCl3)、二氯硅烷 (H2Cl2Si)、溴化氫 (HBr)、氯化氫 (HCl) 0.72-8 ppm
MIDAS-K-HFU 氟化氫 (HF)、六氟化鎢 (WF6) 0.42-2 ppm 0.22-2 ppm
MIDAS-K-HFX 三氟化硼 (BF3)、氟化氫 (HF)、三氟化氮 (NF3)*、六氟化鎢 (WF6) 0.72-8 ppm 1.05-12 ppm 3.6-40 ppm 1.05-12 ppm
MIDAS-K-HFL 三氟化硼 (BF3)、氟化氫 HF（低濃度）、六氟化鎢 (WF6)（低濃度）*** 0.18-2 ppm
MIDAS-K-BR2 溴 (Br2)、二氧化氯 (ClO2) 0.036-0.4 ppm
MIDAS-K-CFX 二氟甲烷 (CH2F2)、六氟丁二烯 (C4F6)**、甲基氟 (CH3F)**、八氟環(huán)戊烯 (C5F8)**, 16-240 ppm 3-40 ppm 8-120 ppm 3-40 ppm
MIDAS-K-COX 一氧化碳 (CO) 9-100 ppm
MIDAS-K-HAL 氯 (Cl2)、氟 (F2) 0.18-2 ppm 0.36-4 ppm
MIDAS-K-B2H 乙硼烷 (B2H6) 0.036-0.4 ppm
MIDAS-K-H2X 氫氣 (H2) 90-1000 ppm
MIDAS-K-HCN 氰化氫 (HCN) 1.8-20 ppm
MIDAS-K-H2S 硫化氫 (H2S) 3.6-40 ppm
MIDAS-K-LEL 氫氣 (H2)、甲烷 (CH4) 6.5-100% LEL
MIDAS-K-NOX 一氧化氮 (NO) 9-100 ppm
MIDAS-K-NO2 二氧化氮 (NO2) 1.05-12 ppm
MIDAS-K-O2X 氧氣 (O2) 0.2-25% v/v
MIDAS-K-O3X 臭氧 (O3) 0.036-0.4 ppm
MIDAS-K-O3H 臭氧 (O3)（高濃度）0.036-0.7 ppm
MIDAS-K-PH3 磷化氫 (PH3