英特格ENTEGRIS純化器現(xiàn)貨，
GPUS300NCX04R02CA，36個
GPUS5000FHX08R00CA，36個
GPUS5000FIX08R00CA，2個
Entegris 的 9N 氣體純化器是一類能將氣體純度提升至 9 個 9（即雜質(zhì)含量小于 1ppb）級別的高端純化設備，結(jié)合你提到的適用氣體種類及流量參數(shù)，其相關特性如下：
適用氣體：可對 N?、Ar、He、Kr、Ne、Xe 等惰性氣體，以及 CF?、CH?、C?H?、C?H?、C?H??等鹵代烴和烴類氣體進行純化。
不同氣體的純化原理和內(nèi)部配置可能會有差異，但均旨在高效去除其中的 H?O、O?、CO、CO?、烴類等雜質(zhì)，以滿足半導體、科研等對氣體純度要求極高的領域需求。
流量規(guī)格：流量為 500slpm（標準升每分鐘），屬于中流量級別。
Entegris 有不同系列的產(chǎn)品可覆蓋該流量需求，例如其 GateKeeper 系列部分型號能滿足類似流量范圍，可根據(jù)具體工藝需求和其他參數(shù)進一步選型適配。
純度性能：作為 9N 級純化器，通常要求進氣純度在 5 個 9 及以上，經(jīng)過純化后可實現(xiàn)氣體雜質(zhì)含量低于 1ppb 的超純水平，
能夠為對氣體純度極為敏感的工藝環(huán)節(jié)提供穩(wěn)定可靠的高純氣體供應。
MICROCONTAMINATION CONTROL
GateKeeper
GPU
IX Media Gas Purifiers
Superior purity control
Entegris’ GateKeeper
GPU gas purifiers were designed
to improve purity consistency, lifetime, and final purity in
microelectronics applications where high-purity gas is critical.
Leveraging our expertise in material science, we have developed
a new generation of IX gas purification products that deliver
unsurpassed value and performance.
APPLICATIONS
—
• Semiconductor
• Data storage
• Flat panel display
• LED
• Solar
FEATURES & BENEFITS
—
Process control and protection Purity control below part-per-billion (ppb) levels
Low pressure drop through the purifier
CE certified to the Pressure Equipment Directive (PED)
Manufactured in an ISO
9001:2015 facility
Cost effective Regenerable – eliminates disposal issues and costs
Long lifetime — improves cost of ownership
Safe and simple to use Uses ambient temperature purification — no heat or power required to operate
Insensitive to orientation (horizontal / vertical)
Outlet particle filter Wafergard
— 316 stainless steel membrane, 20 μm or 0.0015 μm
Lifetime One year with an inlet challenge of 1 ppm moisture and 1 ppm oxygen with flow
rates shown on the next page.
The lifetime varies with the inlet impurities and flow rate. Contact Entegris for
application specific lifetime calculations.
Regenerable Yes (Regeneration is not recommended if process gas is CF4)
Dangerous goods (DG) Yes, UN3190, Class 4.2
Operating temperature 0° – 65°C (32° – 149°F)
Leak rating 1 × 10-9 atm cc
c of He
Materials of construction Housing: 316L stainless steel
Certification CE certified to the Pressure Equipment Directive (PED)
Designed in accordance with ASME
OPERATING SPECIFICATIONS
GPU 15 0.5 slpm 0.3 slpm 2,000 psig 250 psig – 0.1 psid
GPU 35 1 slpm 1.0 slpm 1,400 psig 250 psig – 0.3 psid
GPU 70 5 slpm 1.6 slpm 1,400 psig 250 psig – 0.5 psid
GPU 80 10 slpm 1.9 slpm 1,400 psig 250 psig – 1.0 psid
GPU 100 20 slpm 2.6 slpm 1,000 psig 250 psig – 16.7 psid
GPU 200 20 slpm 4.2 slpm 800 psig 250 psig – 0.7 psid
GPU 300 50 slpm 6.3 slpm 800 psig 250 psig – 1.3 psid
GPU 500 75 slpm 13.0 slpm 600 psig 250 psig – 1.3 psid
GPU 700 120 slpm 18.0 slpm 600 psig 250 psig – 1.8 psid
GPU 2500 4R 300 slpm 65.0 slpm 505 psig 250 psig – 5.0 psid
GPU 2500 8R 500 slpm 65.0 slpm 505 psig 250 psig – 5.6 psid
GPU 3000 500 slpm 75.0 slpm 505 psig 250 psig – 5.6 psid
GPU 5000 500 slpm 125.0 slpm 505 psig 250 psig – 7.0 psid
GPU 10M 8R 1,000 slpm 260.0 slpm 370 psig 250 psig – 5.8 psid
GPU 10M 12R 1,000 slpm 260.0 slpm 370 psig 250 psig – 8.0 psid
GPU 13M 12R 2,000 slpm 320.0 slpm 370 psig 250 psig 2.0 psid –
GPU 13M 16R 2,500 slpm 320.0 slpm 370 psig 250 psig 3.0 psid –
GPU 17M 12R 2,000 slpm 400.0 slpm 370 psig 250 psig 2.0 psid –
GPU 17M 16R 2,500 slpm 400.0 slpm 370 psig 250 psig 3.0 psid –
GPU 20M 12R 2,000 slpm 480.0 slpm 370 psig 250 psig – 19.0 psid
GPU 20M 16R 2,500 slpm 480.0 slpm 370 psig 250 psig – 19.0 psid
*Purifier only at maximum flow rating with 90 psig inlet pressure
FACILITY SPECIFICATIONS
GPU 15 1/4" Male/male 25.4 mm (1.0") 84 mm (3.3") 0.2 kg (0.4 lbs)
GPU 35 1/4" Male/male 38.1 mm (1.5") 84 mm (3.3") 0.3 kg (0.7 lbs)
GPU 70 1/4" Male/male 38.1 mm (1.5") 114 mm (4.5") 0.3 kg (0.7 lbs)
GPU 80 1/4" Male/male 38.1 mm (1.5") 127 mm (5.0") 0.3 kg (0.7 lbs)
GPU 100 1/4” Male/male N/A 84 mm (3.3") 0.9 kg (2.0 lbs)
GPU 200 1/4" Male/male 50.8 mm (2.0") 157 mm (6.2") 0.9 kg (2.0 lbs)
GPU 300 1/4" Male/male 50.8 mm (2.0") 208 mm (8.2") 1.1 kg (2.5 lbs)
GPU 500 1/4" Male/male 76.2 mm (3.0") 201 mm (7.9") 1.8 kg (4.0 lbs)
GPU 700 1/4" Male/male 76.2 mm (3.0") 254 mm (10.0") 2.5 kg (5.5 lbs)
GPU 2500 4R 1/4" Male/male 101.6 mm (4.0") 439 mm (17.3") 6.8 kg (15 lbs)
GPU 2500 8R 1/2" Male/male 101.6 mm (4.0") 445 mm (17.5") 6.8 kg (15 lbs)
GPU 3000 1/2" Male/male 101.6 mm (4.0") 508 mm (20.0") 7.3 kg (16 lbs)
GPU 5000 1/2" Male/male 101.6 mm (4.0") 785 mm (30.9") 10.0 kg (22 lbs)
GPU 10M 8R 1/2" Male/male 152.4 mm (6.0") 737 mm (29.0") 20 kg (44 lbs)
GPU 10M 12R 3/4" Male/male 152.4 mm (6.0") 749 mm (29.5") 21.8 kg (48 lbs)
GPU 13M 12R 3/4" Male/male 152.4 mm (6.0") 892 mm (35.1") 24.9 kg (55 lbs)
GPU 13M 16R 1" Male/male 152.4 mm (6.0") 899 mm (35.4") 24.9 kg (55 lbs)
GPU 17M 12R 3/4" Male/male 152.4 mm (6.0") 1085 mm (42.7") 29.5 kg (65 lbs)
GPU 17M 16R 1" Male/male 152.4 mm (6.0") 1090 mm (42.9") 29.5 kg (65 lbs)
GPU 20M 12R 3/4" Male/male 152.4 mm (6.0") 1290 mm (50.8") 34 kg (75 lbs)
GPU 20M 16R 1" Male/male 152.4 mm (6.0") 1296 mm (51.0") 34 kg (75 lbs)
GPU 15 1/4" Female/female 25.4 mm (1.0") 234 mm (9.2") 1.1 kg (2.4 lbs)
GPU 35 1/4" Female/female 38.1 mm (1.5") 234 mm (9.2") 1.2 kg (2.6 lbs)
GPU 70 1/4" Female/female 38.1 mm (1.5") 264 mm (10.4") 1.3 kg (2.9 lbs)
GPU 80 1/4" Female/female 38.1 mm (1.5") 277 mm (10.9") 1.3 kg (2.9 lbs)
GPU 100 1/4” Female/female N/A 234 mm (9.2") 1.3 kg (2.9 lbs)
GPU 200 1/4" Female/female 50.8 mm (2.0") 307 mm (12.1") 1.7 kg (3.7 lbs)
GPU 300 1/4" Female/female 50.8 mm (2.0") 358 mm (14.1") 1.8 kg (3.8 lbs)
GPU 300 (GC 300) 1/4" Female/male 83.8 mm (3.3") 401.3 mm (15.8") 2.3 kg (5.1 lbs)
GPU 500 1/4" Female/female 76.2 mm (3.0") 351 mm (13.8") 2.7 kg (6.0 lbs)
GPU 700 1/4" Female/female 76.2 mm (3.0") 404 mm (15.9") 4.4 kg (9.6 lbs)
GPU 2500 4R 1/4" Female/female 101.6 mm (4.0") 592 mm (23.3") 6.8 kg (15 lbs)
GPU 2500 8R 1/2" Female/female 101.6 mm (4.0") 714 mm (28.1") 8.0 kg (17.7 lbs)
GPU 3000 1/2" Female/female 101.6 mm (4.0") 777 mm (30.6") 8.5 kg (18.7 lbs)
GPU 5000 1/2" Female/female 101.6 mm (4.0") 1054 mm (41.5") 12.5 kg (27.6 lbs)
GPU 10M 8R 1/2" Female/male 152.4 mm (6.0") 970 mm (38.2") 22.5 kg (49.6 lbs)
GPU 10M 12R 3/4" Female/female 152.4 mm (6.0") 1125 mm (44.3") 24.9 kg (55.0 lbs)
GPU 13M 12R 3/4" Female/female 152.4 mm (6.0") 1270 mm (50.0") 28.1 kg (62.0 lbs)
GPU 13M 16R 1" Female/female 152.4 mm (6.0") 1308 mm (51.5") 29.5 kg (65.0 lbs)
GPU 17M 12R 3/4" Female/female 152.4 mm (6.0") 1461 mm (57.5") 32.7 kg (72.0 lbs)
GPU 17M 16R 1" Female/female 152.4 mm (6.0") 1499 mm (59.0") 34.0 kg (75.0 lbs)
GPU 20M 12R 3/4" Female/female 152.4 mm (6.0") 1666 mm (65.6") 37.2 kg (82.0 lbs)
GPU 20M 16R 1" Female/female 152.4 mm (6.0") 1705 mm (67.1") 38.6 kg (85.0 lbs)
